青云英语翻译

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Very difficult to etch copper, copper interconnects with dual embedded technology, also known as the Dual Damascene process. 1) First, the deposition of a thin layer of silicon nitride (si3n4) as a diffusion barrier and etch stop layer, 2) Then, in a certain thickness of the above deposition of sili

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Because of the copper etching is very difficult, and therefore uses a dual-copper interconnect embedded technology, also known as double-Damascus process. 1) FIRST deposit a thin layer of silicon nitride (Si N 3 4) as a diffusion barrier layer and etch stop layer, 2) and then in the deposition of a
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